Brooks Instrument

Durchflussmesser SLA SLA Family of MFCs, MFMs, PCs and RTs ConfModelCode SLA5850S1TAB1B2A1 CUST P/N LineDescription SLA5850 N2 25 NLPM LineComments REF P/N SPECIAL Base Model SLA5850 REV B Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC Valve Viton Seat O-Ring Viton Elect Conn 15-pin D-Conn Proc Anschl Sz 1/4-in Conn Type BSP Fs Flow Rate 25 NLPM Gas N2 Inl Pressure 6 barg Out Pressure barg 5 Cal Ref Temp 0C Input Signal 0-5V Output Sig 0-5V Comm Smart Emulation Baudrate 19200 OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Single Oem Cust Standard Brooks label Orifice Size Orifice 0.048 Restrictor Type ACLFE/Wiremesh Restrictor Size code Size 4 N2 Gas E. Factor 1 N2_EQ 25 NLPM Cal Sheet Notes CRN Province N/A CAL1 CALIBRATE1 Fluid1 N2 Range1 25 Units1 NLPM InletPressure1 6 barg OutletPressure1 5 barg CalRefTemp1 0C Density1 0.0081 GM/CC SpecificHt1 1.0401 J/g K Filter None Model No Filter Additional Services: No Tag

Elastomer, Digital, Gas Mass Flow / Pressure Meters & Controllers CUST P/N LineDescription SLA5850 Mass Flow Controller Air 1000 NLPH REF P/N Base Model SLA5850 REV B Mass Flow Controller Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC Valve Seat Viton O-Ring Viton Elect Conn 15-pin D-Conn Proc Conn Sz 1/4-in Conn Type BSP Fs Flow Rate 1000 NLPH Gas Air Inl Pressure 7 barg Out Pressure 4.5 bara Cal Ref Temp 0C Input Signal 4-20mA Output Sig 4-20mA Comm Smart Emulation Baudrate 19200 OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Standard Calibration Oem Cust Standard Brooks label Orifice Size 0.048 Restrictor Type ACLFE/Wiremesh Restrictor Size Size code 3 N2 E. Gas Factor 0.998 N2_EQ 16.700067 NLPM CRN Province N/A RT Aux Input N/A Viscosity 0.0184 Density 0.0095 GM/CC Specific Heat 1.0083 J/g K Filter None Filter Model No Additional Services No Tag Replacement for SLA5850S1TAB1C2A1 (S-No: M3272401-001)

Modellcode: 1355GAF3CBFV5AAA 135XG Sho-Rate G Glass Tube Meter ConfModelCode 1355GAF3CBFV5AAA CUST P/N LineDescription 1355G 150mm Scale Meter C2H2 0.32 - 3.2 NM3/H LineComments REF P/N Base Model 1355G Meter Phase Gas Max Pressure 200 psig [14 bar] Max Temperature 250F [121C] End Block Material [A] 316SS Tube Size [F] R-6-15-BG Scale Type [3] Direct Read Float [C] Sapphire - Std 5% Packing/O-Ring Mat [B] Viton / Viton Fittings [F] 316SS - 1/8-in FNPT W/Locknut Valve [V] Cartridge III Valve - High Flow-[5] Outlet Valve Location [5] Outlet Accessories [A] None Options [A] None Certifications [A] None Range 0.32 - 3.2 NM3/H Reference Conditions Inscription1 Fluid Density Viscosity Operating Temp Operating Press CRN Province Option-Tag Factor Tag Factor Tag2 Factor Tag3 Additional Services 0C @ 1 atm NM3/H C2H2@20C 2 barg C2H2 0.9175 S.G. 0.0101 cP 20C 2 barg N/A N/A No Tag

35XG Sho-Rate G Glass Tube Meter ConfModelCode 1355GAF3EBFV5AAA CUST P/N LineDescription 1355G 150mm Scale Meter O2 0.8 - 8 NM3/H LineComments REF P/N Base Model 1355G Meter Phase Gas Max Pressure 200 psig [14 bar] Max Temperature 250F [121C] End Block Material [A] 316SS Tube Size [F] R-6-15-BG Scale Type [3] Direct Read Float [E] Tantalum - Std 5% Packing/O-Ring Mat [B] Viton / Viton Fittings [F] 316SS - 1/8-in FNPT W/Locknut Valve [V] Cartridge III Valve - High Flow-[5] Outlet Valve Location [5] Outlet Accessories [A] None Options [A] None Certifications [A] None Range 0.8 - 8 NM3/H Reference Conditions 0C @ 1 atm Inscription1 NM3/H O2@20C 4.5 barg Fluid O2 Density 1.1087 S.G. Viscosity 0.0203 cP Operating Temp 20C Operating Press 4.5 barg CRN Province N/A Option-Tag N/A Factor Tag Factor Tag2 Factor Tag3 Additional Services No Tag

Rotadurchflussmesser verstärktes T375X Metal Tube Variable Area Flow Meter ConfModelCode 3750CC0A11ALJADAA0 CUST P/N LineDescription 3750C UNKNOWN GAS 87-870 NLPH LineComments REF P/N Max Druck 1500 psig [104 bar] Max Temperature 180F [82C] Meter Accuracy 3% / 2.5 VDI Meter Material 316L SS 3.1 Conn Size 1/4" Conn Type FNPT - Integral Inlet Back Outlet Back O-Ring Viton Meter Lay Length 114.5 MM Valve No Valve w\ Plug Tube Size 0 Float Material Titanium VASE Flow Range 87-870 NLPH Inscription Direct Reading-Gas 2nd Inscr Scale Reference Conditions 0C bei 1 atm Fluid / Gas GAS UNKNOWN Density 0.09 S. G. Viscosity cP 0.012 OperTemperature 104F Oper Pressure psig 573 Elect Output MAT Transmitter - M20 x 1.5 Relay& Pwr Supply No Power Supply or Relay Agency Approval Zone 1, Flame-proof, CENELEC- ATEX Tests and Certificates None Mat Cert w 316SS\ Material Cert 3.1 Accessories Standard CRN N/A Mounting Standard Mount

Rotadurchflussmesser, verstärkt, 1500 psi, 4-20 MA, Zertifikat nach ATEX EEx-D, Messbereich 1,6-16 L/h, die spezifische Dichte von 0,65, eine Viskosität von 0,28 jV

Elastomer Sealed, Analog Gas Mass Flow Meters CUST P/N LineDescription 5861EA Mass Flow Meter O2 50 NLPM REF P/N with Oxygen cleaning Special Label Base Model 5861EA Mass Flow Meter Max Pressure 1500 psig [103 BAR] Max Temperature 149F [65C] Body Material 316L SS Finish Valve Type No Valve Valve Seat None O-Ring Viton o-ring Elec Connection D-Connector Process Connection 1/4-in Compression Calibration High Flow | High Press Soft Start Disable 5V Ref N/A Input Signal N/A Output Signal 0-5V Options OEM Code [A] Std Brooks Labeling Process Gas O2 Cal Ref Temp 0С Flow Rate 50 NLPM Inlet Pressure 10 bara Outlet Pressure N/A Density 0.013141 GM/CC Viscosity 0.0203 cP Specific Heat 0.921593809833082 J/g K Mounting Attitude [1] Horizontal, base down Orifice Size None Restrictor Size Size Code E ROHS Restrictor Type Sintered N2 E. Gas Factor 0.988 N2_EQ 50.607287 NLPM Operating Temp 20C Filter None Additional Services Decl 2.1 - Oxygen Cleaning No Tag 1/4 Compression

Mass Flow Controller: Rugged industrial MFC featuring industry leading repeatability, fast response, ultra-low drift and self diagnostics SLAMF53S2FAB2G2A1 Customer Part Number . Revision Rev B Base Model SLAMF53 Rev B Flow Controller Max Press 1000 psig [69 BAR] Max Temp 149F [65C] Body Material 316L SS Valve Type Normally closed Valve Seat Material Viton Seals / O-Ring Viton o-rings Electrical Connector PG11 Cable Gland Connection Size 1-IN Connection Type Comp FS Flow Rate 40 NM3H Fluid / Gas AIR Flow Type SV Inlet Pressure 9.00 barg Outlet Pressure 6.500 barg Cal Ref Temp 0'C Communications Smart Emulation SLAMF53S2FAB2G2A1 (Continued) Input Signal 4-20mA Output Signal 4-20mA Electrical Conn. - Digital Smart Emulation (Analog and/or RS485) REV-B Baud Rate 19200 baud Standard Rate Output Enhancement Standard settling / response time Power Supply 24 Vdc Certification None (safe area use) Mounting Attitude (1) Horizontal base down Calibration Single standard calibration up to 200 PSIG OEM Standard Brooks label Orifice 0.032 orifice Restrictor Size code D Restrictor Type LFE Customer Tag Requirements No Tags Operating Temp 20 C Sensor Factor 0.998 Replacement for SLAMF53S2FAB2G2A1 (S-No.: M31970),

Modellcode: 3809GBC07CFBF6D3A000 38XXG Metal Tube Variable Area Flow Meter ConfModelCode 3809GBC07CFBF6D3A000 CUST P/N LineDescription MT3809 SS UNKNOWN GAS 11 - 80 NLPM LineComments REF P/N Base Model MT3809 SS Max Press @ TMin 275 PSIG (19 BAR) Max Press @ TMax 94 PSIG (6.5 BAR) CRN Province N/A Max Temperature 788F (420C) Min Temperature -325F (-198C) Accuracy 1.6 VDI -Direct Scale-Gas Meter Material 316/316L SS w/ Cert 3.1 Connection Size 1-in Connection Type 150# RF Flange Accessories HI TEMP-SZ7-13 Inlet Down Outlet Up O-Ring Material None Meter Lay Length 250 mm Valve No Valve Valve Connection No Valve Tube Size 7-C 1.2/V Float 7-V-14 Float Material 316L SS Range 11 - 80 NLPM Reference Conditions 0C @ 1 atm Scale Inscr1 Direct Read 2nd Scale Inscr N/A Scale Type White Face Metal Scale Fluid UNKNOWN GAS Density 19.4 M.W. Viscosity 0.02 cP Operating Temperature 80C Operating Pressure 0.03 MPag Ambient Temperature -40C to 70C Indicator Housing XP STAINLESS - HIGH TEMP Electrical Connection 1/2" NPT-F Indicator/Alarm/Transmit Transmitter 4-20ma Approvals ZONE 2 NON-SPARK Remote Relay None Power Supply None Certification (1) N/A Certification (2) N/A Factor Tag Factor Tag2 Factor Tag3 2nd Scale Inscrip N/A Additional Services: ICC No Tag

Elastomer, Digital, Gas Mass Flow / Pressure Meters & Controllers CUST P/N LineDescription SLAMF63 CH4 5 NM3H REF P/N SPECIAL Base Model SLAMF63 REV B Max Press 1000 psig [69 BAR] Max Temperature 149F [65C] Temperature 25C Meter Material 316L SS Valve Type None (Sensor only) Valve Seat None (Sensor only) O-Ring Buna Elect Conn PG11 Cable Gland Proc Conn Sz 3/4-in Conn Type Comp Fs Flow Rate 5 NM3H Gas CH4 Inl Pressure 0.5 bara Out Pressure N/A Cal Ref Temp 0C Input Signal NA Output Sig 4-20mA Comm Smart Emulation Baudrate 19200

Elastomer Sealed, Digital, MultiFlo™ Gas Mass Flow Meters & Controllers CUST P/N LineDescription [GF040] Elastomer Mass Flow Controller 0008 - Air 25L REF P/N Base Model GF040 Elastomer Seal/ Low Flow (0-50 slpm) Configurability [C] Configurable Special Application [XX] Standard Valve [C] Normally Closed Gas [0008] Air Flow Rate 25 SLPM Fitting [T0] 10mm tube comp Downstream Condition [P] Positive Pressure Seals [V] Viton Connector/Commmunic ations [S4] S-Protocol RS485 (SLA) 4- 20mA IN/OUT Customer Special Request [XXXX] - No Special Request Auto Shut-Off [A] Auto Shut-Off included Auto Zero [X] Auto Zero not included Ref Temp [00C] 0'C Bin Size SA48 - Flow 15 - 30 SLPM N2 Eq. (0C) Additional Services No Tags

Elastomer, Digital, Gas Mass Flow / Pressure Meters & Controllers CUST P/N LineDescription SLA5850 Mass Flow Controller Air 25 NLPM REF P/N Base Model SLA5850 REV B Mass Flow Controller Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC Valve Seat Viton O-Ring Viton Elect Conn 15-pin D-Conn Proc Conn Sz 6mm Conn Type Comp w\Filter Fs Flow Rate 25 NLPM Gas Air Inl Pressure 7 barg Out Pressure 3.5 barg Cal Ref Temp 0C Input Signal 4-20mA Output Sig 4-20mA Comm Smart Emulation Baudrate 19200 OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Standard Calibration Oem Cust Standard Brooks label Orifice Size 0.048 Restrictor Type ACLFE/Wiremesh Restrictor Size Size code 4 N2 E. Gas Factor 0.998 N2_EQ 25.0501 NLPM CRN Province N/A RT Aux Input N/A Viscosity 0.0184 Density 0.0095 GM/CC Specific Heat 1.0083 J/g K Filter None Filter Model No Additional Services No Tag

Rotameter. Skalenlänge von 0 bis 250/300 PSI, Vertikaler Anschluss ½ NPT

Massendurchflussmesser. Die Seriennummer des auf Lager befindlichen Durchflussmessers lautet M3266701001

Acrylic VA Flow Meter CUST P/N LineDescription [2510A] 1/8-in FNPT Acrylic Meter [2A15] Air | 1 - 10 LPM REF P/N Base Model 2510 Max Pressure 100 PSIG Max Temperature 150 F Flow Range [2A15] 1 - 10 LPM Air Fitting Material [B] Brass Valve [V] Standard Inlet Valve Seals [BN] Buna OEM Standard Brooks Logo Float Material 316SS Accuracy 5% - Zolltarifnummer: 9026 80 80 - Ursprungsland: Ungar